281037 Nanostrukturphysik (präparative und analytische Methoden der Nanostrukturierung, auch als Fortsetzung der Vorlesung Physik dünner Schichten I des WS 02/03) (V+Ü) (SoSe 2003)
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Contents, comment
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Präparative und analytische Methoden der Nanostrukturierung (Lithographie, Ätzprozesse, Querschnittspräparation, Schichtmessverfahren, Elektronenmikroskopie, Röntgenbeugung, Rastersondenverfahren, Selbstorganisation u.a.) mit praktischer Einweisung in den
entsprechenden Laboren
Requirements for participation, required level
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Festkörper- und Oberflächenphysik
Bibliography
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Büttgenbach: Mikrostrukturtechnik / (Teubner, Taschenbuch)
Ray-Choudhury; Handbook of Microlithography (Cambridge Univ. Press)
u.a.
Teaching staff
Dates ( Calendar view )
| Frequency | Weekday | Time | Format / Place | Period | |
|---|---|---|---|---|---|
| by appointment | n.V. |
Subject assignments
| Degree programme/academic programme | Validity | Variant | Subdivision | Status | Semester | LP | |
|---|---|---|---|---|---|---|---|
| Physik / Bachelor | (Enrollment until SoSe 2011) | Kern- und Nebenfach | Modul 19; Profil Biophysik | Wahlpflicht | 7. 8. | 5 | unbenotet |
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- Notes:
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- Last update basic details/teaching staff:
- Friday, December 11, 2015
- Last update times:
- Friday, March 14, 2003
- Last update rooms:
- Friday, March 14, 2003
- Type(s) / SWS (hours per week per semester)
- lecture (V) + exercise (Ü) / 2+2
- Department
- Faculty of Physics
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